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Silicon Carbon Cantilever Paddle As Insert And Withdraw Wafer Carriers

Silicon Carbon Cantilever Paddle As Insert And Withdraw Wafer Carriers.

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Introduce

In particular, the reaction sintering silicon carbide cantilever paddle has the characteristics of high strength, high purity, high thermal conductivity, no porosity, acid and alkali corrosion resistance, no pollution at high temperature, no deformation, good thermal shock resistance and large load capacity, which avoids direct contact with furnace tubes and extends the service life of furnace tubes.

Advantages

1. High strength, high purity, and high thermal conductivity

2. Acid and alkali corrosion resistance

3. Good thermal shock resistance.

4. Large load capacity5. Non-deformation

Data Sheet

ITEM	INDEX
Density (g/cm³)	3.03
Bending Strength (Mpa)	270 （20℃）
Max. Temperature (℃）	1350 ℃

Application

SiC Cantilever paddle is the key component of wafer loading system in furnace reactors.

Packing

In plywood case

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